In November 2017, “Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis” was published in JVST A with lead author Jiun-Ruey Chen, found here.
In November 2017, “Design and characterization of a microreactor for spatially confined atomic layer deposition and in situ UHV surface analysis” was published in JVST A with lead author Jiun-Ruey Chen, found here.